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Izinzuzo zamatshe alinganayo e-cylindrical and planar magnetron sputtering

2021年10月19日

Uma kuqhathaniswa nezinye izinhlobo zemagnetron sputtering target, amatshe alumayo e-cylindrical and planar magnetron sputtering agcina izinzuzo zokufana okuhle kokumboza kokuqondiwe okungunxande, futhi ingakhulisa okubhekiswe kukho ngokusebenzisa izindlela ezimbili ezilandelayo Isilinganiso sokusetshenziswa:

(1) Lapho amaqembu amabili (ezine) yemigodi emise okwendandatho ebusweni obubhekiwe ifinyelela ekujuleni okuthile, umnyombo welitshe (ingxenye kazibuthe) ingazungeziswa ama-45 ° ngokuhlobene nethubhu ekhonjiwe, ukuze ezinye izindawo kushubhu lelitshe elingakagcotshwanga zisebenzise Sebenzisa

(2) Lapho umgomo ohlosiwe we-cylindrical kanye ne-planar magnetron sputtering target yakhelwe njengomgogodla ojikelezayo, (umnyombo welitshe uyashintshana ngesikhathi sokukhwahlela), Ubuso bento eqondisiwe bungaphazwa ngokulinganayo ungqimba ngongqimba, futhi ngeke ibe khona imigodi. Ngalesi sikhathi, izinto eziqondiwe zizosetshenziswa ngempumelelo enkulu, futhi isilinganiso sokusetshenziswa kwento eqondiwe ingafinyelela 50% uku 60%. Lapho okubhekiswe kukho kuyinto eyigugu yensimbi, lokhu ngokungangabazeki kubaluleke kakhulu..

Ngokwamukela isimiso sikazibuthe nesihlangu ku-coaxial cylindrical magnetron sputtering target ukuxazulula inkinga yokugcina amandla kazibuthe, ithagethi eliyiplanethi elingunxande lingaguqulwa libe yisilinda, iplanethi ye-magnetron sputtering target, okugcina ukugqokiswa kwelitshe elingunxande leplanethi Esimweni sokufana okuhle, isilinganiso sokusetshenziswa kwento eqondiwe singakhuliswa, ngaleyo ndlela kuthuthukiswe izinzuzo zezomnotho.

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