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Umgaqo wokujolisa ekujolekeni kwemagnetron

2021年8月31日

 

Umgaqo wokutshiza wemagnetron: yongeza i-orthogonal field magnetic kunye nensimu yombane phakathi kokujoliswe kuyo (isiseko) kunye ne-anode, kunye nokujolisa ekujongeni kugcwaliswe ngerhasi efunekayo yokungena (ngesiqhelo iar) kwigumbi eliphezulu. Imagnethi esisigxina yakha a 250-350 Intsimi yemagneti yeGauss kumphezulu wezinto ekujoliswe kuzo, kwaye yenze intsimi ye-orthogonal ye-electromagnetic ngecandelo lombane wombane ophezulu..

Ngaphantsi kwesenzo sentsimi yombane, Irhasi ye-ion ion kwii-ion ezintle kunye nee-elektroni. Umbane othile ophakamileyo ongalunganga usetyenziselwa ekujoliseni. Ii-elektroni ezikhutshwe kwithagethi zichaphazeleka ngamandla kazibuthe kunye namathuba e-ionization okusebenza kwegesi eyonyukayo, Ukwenza iplasma ephezulu kakhulu kufutshane ne-cathode. Ngaphantsi kwesenzo samandla kaLorentz, Ii-ions ze-Ar zikhawulezisa ukuya kwindawo ekujoliswe kuyo kwaye ziqhushumbe kwindawo ekujoliswe kuyo ngesantya esiphezulu, Ukuze ii-athomu zikhutshwe ekujoliswe kuzo zilandele umgaqo wokuguqulwa kwamandla kunye nokubhabha kude nomhlaba ojoliswe kuwo ngamandla aphezulu e-kinetic. Zeendawana umboniso. Imagnetron sputtering ngokubanzi yahlulwe yaziindidi ezimbini: Ukutshiza i-DC kunye nokujikeleza kwamaza kanomathotholo. Umgaqo-nkqubo wezixhobo zokuchamela ze-DC ulula. Xa ujikeleza isinyithi, izinga layo nalo liyakhawuleza..

Uluhlu lwesicelo sokuphindaphindwa kwamaza kanomathotholo lubanzi ngakumbi. Ukongeza ekujongeni izinto zokuqhuba, Izinto ezingahambisiyo zinokuchaphazeleka. Ngaxeshanye, Inokuphinda isebenze ukuntywila okusebenzayo ukulungiselela izinto ezimbaxa ezinje ngee-oksidi, iinitridi, kunye neeCarbides..Xa ukuphindaphindeka kokuphindaphindwa kwento ojolise kuyo ekujoliswe kuyo kuyanda, iba yimichiza yeplasma yokutshiza. Ngoku, i-electron cyclotron resonance (ECR) uhlobo lwe-microwave plasma sputtering luqhele ukusetyenziswa..

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