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Umgaqo wokujolisa ekujoliswe kuyo kumazibuthe

2021年8月31日

 

Umgaqo wokujolisa ekujoliswe kwimagnetron meko:

Indawo ye-magnetic orthogonal kunye nensimu yombane yongezwa phakathi kweethagethi ezichongiweyo (isiseko) kunye ne-anode, kunye negesi engenayo efunekayo (ngesiqhelo iar) igcwele kwigumbi eliphezulu lokucoca. Iifom zemagnethi esisigxina 250-350 kumphezulu wezinto ekujoliswe kuzo. Intsimi yamagnetic yaseGaussian, kwaye intsimi yombane enezixhobo eziphezulu zombane ye-orthogonal ye-electromagnetic field.

Ngaphantsi kwesenzo sentsimi yombane, Irhasi ye-ion ion kwii-ion ezintle kunye nee-elektroni. Umbane othile ophakamileyo ongalunganga usetyenziselwa ekujoliseni. Ii-elektroni ezikhutshwe kwithagethi zichaphazeleka ngamandla kazibuthe kunye namathuba e-ionization okusebenza kwegesi eyonyukayo, Ukwenza iplasma ephezulu kakhulu kufutshane ne-cathode. Ngaphantsi kwesenzo samandla kaLorentz, Ii-ions ze-Ar zikhawulezisa ukuya kwindawo ekujoliswe kuyo kwaye ziqhushumbe kwindawo ekujoliswe kuyo ngesantya esiphezulu, Ukuze ii-athomu zikhutshwe ekujoliswe kuzo zilandele umgaqo wokuguqulwa kwamandla kunye nokubhabha kude nomhlaba ojoliswe kuwo ngamandla aphezulu e-kinetic. Zeendawana umboniso.

Imagnetron sputtering ngokubanzi yahlulwe yaziindidi ezimbini: Ukuchaphazeleka kwamatyala kunye nokuhamba kwamaza kanomathotholo. Umgaqo wezixhobo ezinjenge-spututinging ilula, kwaye ireyithi yayo iyakhawuleza xa kusenziwa isinyithi..Uluhlu lwesicelo sokuphindaphindwa kwerediyo lubanzi ngakumbi. Ukongeza ekujongeni izinto zokuqhuba, Izinto ezingahambisiyo zinokuchaphazeleka. Ngaxeshanye, Inokuphinda isebenze ukuntywila okusebenzayo ukulungiselela izinto ezimbaxa ezinje ngee-oksidi, iinitridi, kunye nee carbides..Ukuba amaza erediyo anyukile, iba yimichiza yeplasma yokutshiza. Ngoku, i-electron cyclotron resonance (ECR) uhlobo lwe-microwave plasma sputtering luqhele ukusetyenziswa..

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