Igama lemveliso:Tantalum target material
IBakala: Ta1.Ta2.TaW2.5.TaW10.
Standard:GB/3629-2006
Ucoceko:≥99.95%
Condition: annealed (M) or hard (Y)
Ubungakanani:
Ububanzi obungaphandle (mm) | Ukutyeba (mm) | Uburhabaxa bomhlaba | Ukucaba |
50~ 400 | 3~ 50 | 32IiRms | ≤0.15% |
Phawula: Iimveliso ezizodwa kufuneka kuxoxiswane ngazo phakathi kokunikezelwa kunye nemfuno. |
Iimfuno zezithako:
Igama lebrand | Umxholo wokuqala (iqhezu lobunzima %) | |||||||||||
C | U-N | O | H | Fe | Kwaye | Ni | Wena | Mo | UW | Qaphela | UTa | |
Ta1 | 0.01 | 0.005 | 0.015 | 0.0015 | 0.005 | 0.005 | 0.002 | 0.002 | 0.01 | 0.01 | 0.05 | Iindawo zokuhlala |
Ta2 | 0.02 | 0.025 | 0.03 | 0.005 | 0.03 | 0.02 | 0.005 | 0.005 | 0.03 | 0.04 | 0.1 | Iindawo zokuhlala |
I-TaNb3 | 0.02 | 0.025 | 0.03 | 0.005 | 0.03 | 0.03 | 0.005 | 0.005 | 0.03 | 0.04 | 1.5~ 3.5 | Iindawo zokuhlala |
UmNxeba | 0.02 | 0.025 | 0.03 | 0.005 | 0.03 | 0.03 | 0.005 | 0.005 | 0.02 | 0.04 | 17~ 23 | Iindawo zokuhlala |
TaNb40 | 0.01 | 0.01 | 0.02 | 0.0015 | 0.01 | 0.005 | 0.01 | 0.01 | 0.02 | 0.05 | 35~ 42 | Iindawo zokuhlala |
I-TaW2.5 | 0.01 | 0.01 | 0.015 | 0.0015 | 0.01 | 0.005 | 0.01 | 0.01 | 0.02 | 2.0~ 3.5 | 0.5 | Iindawo zokuhlala |
I-TaW7.5 | 0.01 | 0.01 | 0.015 | 0.0015 | 0.01 | 0.005 | 0.01 | 0.01 | 0.02 | 6.5~ 8.5 | 0.5 | Iindawo zokuhlala |
I-TaW10 | 0.01 | 0.01 | 0.015 | 0.0015 | 0.01 | 0.005 | 0.01 | 0.01 | 0.02 | 9.0~ 11 | 0.1 | Iindawo zokuhlala |
Ukusetyenziswa: I-Tantalum ekujoliswe kuyo yiphepha le-tantalum elifunyenwe ngokucwangciswa kwengcinezelo, ngobunyulu beekhemikhali obuphezulu, ubungakanani obuncinci beenkozo, ulungelelwaniso oluhle lombutho kunye nokungaguquguquki kwezi zinto zintathu.
Ubukhulu becala kusetyenziswa sputtering sebethule ukutyabeka ifayibha enombala, I-semiconductor wafer kunye nesekethe edityanisiweyo, Ukujoliswa kwe-tantalum kunokusetyenziselwa ukutyabeka kwe-cathode, Umshini wokutsala ophezulu osebenzayo, njl.
Yinto ebalulekileyo kwitekhnoloji yefilimu encinci. Iimbumbulu zokuhlaba izixhobo: Iimbumbulu ezenziwe ngetanti ye-Tantalum luhlobo lomjukujelwa, ezifana nomjukujelwa we-TOW2B. I-Ta-10W kunye nezinye ialloys zinokwenziwa zibe ziimbumbulu zokugqobhoza izixhobo.