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Ihe mgbaru ọsọ na-agbasa Magnetron

2021年10月29日

1) Ụkpụrụ ịgbasa Magnetron.
N'osisi lekwasịrị anya sputtered (cathode) na anode n'etiti mgbakwunye nke orthogonal magnetik na eletrik eletrik, n'ime ụlọ ezumike dị elu jupụtara na gas inert chọrọ (na -emekarị Ar gas), ihe ndọta na-adịgide adịgide n'elu ihe ebumpụta ụwa iji mepụta oghere ndọta 250 ~ 350 gauss, na elu voltaji ọkụ eletrik na-etolite ihe orthogonal electromagnetic field. N'okpuru ọrụ nke ọkụ eletrik, Ar gas na-ionized n'ime nti ion na electrons, lekwasịrị anya na-agbakwunyere na ụfọdụ adịghị mma elu voltaji, Eletrọns sitere na ebumnuche a na-arụ ọrụ nke oghere magnetik na ioniization nke gas na-arụ ọrụ na-abawanye., a na-emepụta plasma njupụta dị elu n'akụkụ cathode, na Ar ion na-accelerated n'okpuru omume nke Lorentz ike na-efega kwupụta lekwasịrị n'elu, bombarding elu lekwasịrị anya na nnọọ nnukwu ọsọ, nke mere na atọm sputtered si lekwasịrị anya na-agbaso ụkpụrụ nke ntugharị ọkụ na a elu The atọm sputtered na lekwasịrị anya na-eso kinetic ume mgbanwe ụkpụrụ na-efepụ lekwasịrị n'elu kwupụta mkpụrụ iji tinye ihe nkiri.. A na -ekewa ihe ndọta magnetọ n'ụdị abụọ: DC sputtering na RF sputtering, ebe ụkpụrụ nke DC sputtering akụrụngwa dị mfe na ọnụego dị ngwa ngwa mgbe sputtering ọla. RF mgbasa ozi, n'akụkụ aka nke ọzọ, enwere ike iji ya n'ụdị ngwa dị iche iche ma nwee ike ịgbasa ihe ndị na-adịghị arụ ọrụ na mgbakwunye na ihe ndị na-eduzi ọkụ eletrik., yana reactive sputtering maka nkwadebe nke compound ihe dị ka oxides, nitrides na carbides. Ọ bụrụ na abawanye ugboro nke RF ọ na-aghọ ngwa ndakwa nri plasma sputtering, taa, A na -ejikarị resonance elektrọn cyclotron (ECR) Pịnye ngwa ndakwa nri plasma sputtering.
2) Ụdị ebumnuche magnetron na-agbasa.
Metal sputtering mkpuchi lekwasịrị, alloy sputtering mkpuchi lekwasịrị, ihe mkpuchi mkpuchi seramiiki, eburu ihe mgbaru ọsọ seramiiki, ebumnobi carbide seramiiki, ebumnuche seramiiki fluoride, nitride ceramic sputtering lekwasịrị anya, seramiiki oxide lekwasịrị anya, ebumnuche selenide seramiiki sputtering, silicate seramiiki sputtering lekwasịrị, ebumnobi sulfide seramiiki, ebumnuche ebumnuche telluride seramiiki, ihe ndị ọzọ metụtara seramiiki, chromium-doped ihe mgbaru ọsọ seramiiki silicon oxide (Cr-SiO), Indum phosphide na -achọ (InP), bụru ndu arsenide (PbAs), indium arsenide lekwasịrị anya (InAs). [2]
Olu Editọ Mpaghara Ngwa
Dị ka anyị niile maara, usoro mmepe teknụzụ nke ihe ebumnuche nwere njikọ chiri anya na mmepe nke teknụzụ ihe nkiri dị mkpa na ụlọ ọrụ ngwa ala, na dị ka ụlọ ọrụ ngwa na-emeziwanye teknụzụ na ngwaahịa ma ọ bụ ihe nkiri dị mkpa, teknụzụ ihe elekwasịrị anya kwesịkwara ịgbanwe. Ọmụmaatụ, Ndị na-emepụta Ic. Na-adịbeghị anya raara nye mmepe nke ala resistivity ọla kọpa wiring, A na-atụ anya na ọ ga-eji dochie ihe nkiri aluminom mbụ n'ime afọ ole na ole sochirinụ, nke mere na mmepe nke ọla kọpa zaa na ihe mgbochi oyi akwa ha chọrọ ga-adị ngwa ngwa. Na mgbakwunye, n'afọ adịbeghị anya, ihe ngosi ogwe ntụpọ (FPD) jiri dochie tube cathode ray mbụ (CRT) dabere na kọmputa nyochaa na ahịa telivishọn. Ọ ga-abawanyewanye teknụzụ na ahịa ahịa maka ebumnuche ITO. Na mgbakwunye, na teknụzụ nchekwa. Nnukwu njupụta, diski ike dị elu, Ọchịchọ diski anya njupụta dị elu na-aga n'ihu na-abawanye. Ihe ndị a niile ebutela mgbanwe n'ọchịchọ ụlọ ọrụ ngwa maka ihe ebumnuche. N'ime ndị na-esonụ, anyị ga-ewebata isi ngwa mpaghara nke lekwasịrị ihe, na usoro ebumnuche mmepe ihe onwunwe na mpaghara ndị a.
Microelectronics
Ụlọ ọrụ semiconductor nwere ihe kachasị mma chọrọ maka ihe nkiri na-agbapụta agbapụ nke ụlọ ọrụ ngwa ọ bụla. Taa, silicon wafer nke ruru 12 sentimita asatọ (300 epitodes) na-arụpụtara. ebe obosara nke njikọ njikọ na-ebelata. Ihe ndị a chọrọ nke ndị na-emepụta silicon wafer maka nnukwu nha, ịdị ọcha dị elu, nkewa dị ala na ezigbo ọka chọrọ ka ebumnuche ndị a rụpụtara nwere microstructure ka mma. Achọpụtala dayameta urughuru kristal na ịdị n'otu nke ebumnuche dị ka isi ihe na-emetụta ọnụego ntinye ihe nkiri ahụ.. Na mgbakwunye, ịdị ọcha nke ihe nkiri ahụ dabere na ịdị ọcha nke ebumnuche. N'oge gara aga, a 99.995% (4N5) Ebumnuche ọla kọpa dị ọcha nwere ike igbo mkpa nke ndị na-emepụta semiconductor maka usoro 0.35pm, ma ọ nweghị ike imezu ihe achọrọ nke usoro 0.25um nke taa, mgbe 0.18um} nkà ma ọ bụ ọbụna 0.13m usoro maka unmetered ga-achọ a lekwasịrị ọcha nke 5 ma ọ bụ ọbụna 6N ma ọ bụ karịa. Ọla kọpa tụnyere aluminom, ọla kọpa nwere elu iguzogide electromigration na ala resistivity izute! Usoro nhazi chọrọ wiwi sub-micron n'okpuru 0.25um mana ọ na-ebute nsogbu ndị ọzọ: ike adhesion nke ọla kọpa na ihe dielectric organic dị ala. Ọ dịkwa mfe imeghachi omume, N'ihi na ojiji nke mgbawa ọla kọpa interconnection akara bụ corroded na agbajikwa. Iji dozie nsogbu ndị a, mkpa ịtọ ntọala ihe mgbochi n'etiti ọla kọpa na dielectric oyi akwa. A na-ejikarị ihe mkpuchi oyi akwa eme ihe dị elu, elu resistivity nke metal na ogige ya, ya mere ọkpụrụkpụ nke oyi akwa mgbochi erughị 50nm, na ọla kọpa na dielectric ihe adhesion arụmọrụ dị mma. Njikọ ọla kọpa na njikọta aluminom nke ihe mgbochi oyi akwa dị iche. Ekwesịrị imepụta ihe ọhụrụ ebumnuche. Njikọ ọla kọpa nke oyi akwa mgbochi nwere ihe ebumnuche gụnyere Ta, W, TaSi, WSi, wdg. Ma Ta, W bụ ọla ndị na-agbanwe agbanwe. Mmepụta dịtụ ike, ugbu a na-amụ molybdenum, chromium na ọla edo Taiwan ndị ọzọ dị ka ihe ọzọ.
Maka ngosipụta
Ngosipụta panel dị larịị (FPD) enweela mmetụta dị ukwuu na nyocha kọmputa na ahịa telivishọn kemgbe ọtụtụ afọ, tumadi n'ụdị cathode ray tubes (CRT), nke ga-eme ka teknụzụ na ahịa ahịa maka ebumnuche ITO. Enwere ụdị ebumnuche iTO abụọ dị taa. Otu bụ ojiji nke nano-state indium oxide na tin oxide ntụ ntụ agwakọta na sintered, otu bụ iji indium tin alloy target. Enwere ike iji ebumnuche indium-tin alloy mee ihe maka ihe nkiri dị mkpa nke ITO site n'ịgbasa ọkụ DC, ma elu ezubere iche ga-oxidise ma na-emetụta ọnụego sputtering, na ọ dịghị mfe inweta nnukwu nha nke ọla edo Taiwan. N'oge a, A na-anabata usoro mbụ iji mepụta ebumnuche ITO, na-eji L}IRF reactive sputter mkpuchi. Ọ nwere ọsọ nkwụnye ego. Na ike n'ụzọ ziri ezi ịchịkwa ọkpụrụkpụ nke ihe nkiri, elu conductivity, ezigbo agbanwe agbanwe nke ihe nkiri ahụ, na ike adhesion na mkpụrụ, wdg. l. Ma ihe isi ike mmepụta ihe ezubere iche, nke bụ n'ihi na indium oxide na tin oxide adịghị mfe ijikọ ọnụ. ZrO2, A na-ejikarị Bi2O3 na CeO mee ihe dị ka mgbakwunye ihe mgbakwunye ma nwee ike nweta ebumnuche yana njupụta nke 93% na 98% nke usoro iwu. Arụmọrụ nke ihe nkiri ITO etolite n'ụzọ dị otu a dabere na mgbakwunye. Ndị ọkà mmụta sayensị Japan na-eji Bizo dị ka ihe mgbakwunye, Bi2O3 gbazere na 820Cr wee gbazee n'ofe okpomọkụ nke l500ºC.. Nke a na-enyere aka inweta ebumnuche ITO dị ọcha dị n'okpuru ọnọdụ nbibi mmiri. Ọzọkwa, akụrụngwa oxide achọrọ ekwesịghị ịbụ nanoparticles, nke na-eme ka usoro mmalite dị mfe. N'ime 2000, National Development Planning Commission, Ministry of Science and Technology Ministry of Science and Technology na “ugbu a mkpa mmepe nke ozi ụlọ ọrụ isi ebe ndu”, ITO nnukwu ihe ezubere gụnyekwara.
Maka nchekwa
Na teknụzụ nchekwa, mmepe nke elu-njupụta, diski ike dị elu chọrọ nnukwu ihe nkiri ihe nkiri magnetoresistive buru ibu, na CoF ~ Cu multilayer ihe nkiri mejupụtara bụ nnukwu ihe nkiri magnetoresistive a na-ejikarị eme ihe taa. A ka na-emepụta ihe TbFeCo alloy a chọrọ maka diski magnetik, na diski magnetik mere site na ya nwere ikike nchekwa dị elu, ogologo ndụ na enwere ike ihichapụ ugboro ugboro na-enweghị kọntaktị. diski magnetik emepụtara taa nwere usoro ihe nkiri mejupụtara oyi akwa nke TbFeCo/Ta na TbFeCo/Al.. Akụkụ ntụgharị nke Kerr nke nhazi TbFeCo/AI ruru 58, ebe TbFeCofFa nwere ike ịnọ nso 0.8. Achọpụtala na ikike ndọta dị ala nke ihe a na-achọsi ike dị elu voltaji na-agbapụta akụkụ AC l na-eguzogide ike eletrik.
Germanium antimony telluride gbadoro ụkwụ na-echeta mgbanwe oge (PCM) egosila ikike azụmaahịa dị mkpa dị ka teknụzụ ebe nchekwa ọzọ maka ụdị flash NOR yana akụkụ nke ahịa DRAM, agbanyeghị, Otu n'ime ihe ịma aka ndị dị n'okporo ụzọ na-aga n'ihu ngwa ngwa bụ enweghị mkpụrụ ndụ hermetic zuru oke nke enwere ike ịmepụta iji belata nrụgharị ugbu a.. Igwe ntọgharị ala nwere ike ibelata oriri ike ebe nchekwa, ịgbatị ndụ batrị ma mụbaa bandwidth data, atụmatụ niile dị mkpa maka data-centric nke oge a, ukwuu obere n'ji

 

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