Sputtering lub hom phiaj

Cov txheej txheem ntsuas cov npe ntawm ntau txheej txheej tshuab kho qhov muag

qauv

GX-1050A

GX-800A

GX-900A

GX1200A

Txheej chav loj

1050 × 1250 hli, 304 stainless hlau.

800 × 1000 hli

900 × 1050 hli

1200 × 1250 hli

Sab hauv loj ntawm txheej kab noj hniav

Cov khoom sib dhos yog 1680mm siab dua hauv av, haum rau ergonomic lag luam qhov siab.

Cov khoom sib dhos yog 1468mm siab dua hauv av, haum rau ergonomic lag luam qhov siab.

Cov khoom sib dhos yog 1510mm siab dua hauv av, haum rau ergonomic lag luam qhov siab.

1.Arched ib leeg-workpiece disc, kom tau raws li cov neeg siv khoom’ xav tau kev sib txig sib luag kom ntau dua.Rotation 5-30r/min, stepless hloov ceev.

2.Arched peb-workpiece disc, planetary kiv puag ncig thiab kev sib hloov, kom tau raws li qhov xav tau ntawm cov neeg siv khoom rau lub peev xwm ntau lawm.Rotation 5-30r/min, stepless hloov ceev.

Khoom siv

Muaj nyob rau hauv plaub-daim, lub kaum sab xis ntawm tus bracket yog kho tau, kom tau raws li qhov xav tau ntawm cov neeg siv khoom rau kev ua kom zoo dua qub.Rotation 5-30r/min, stepless hloov ceev.

Arched ib leeg-workpiece disc, kom tau raws li cov neeg siv khoom’ xav tau kev sib txig sib luag kom ntau dua.Rotation 5-30r/min, stepless hloov ceev.

Lub tshuab nqus tsev

Chav nyob: diffusion twj DIP-12000 (Leybold), Cov hauv paus hniav ZJY-300, cov twj siv tshuab 2X-70, twj tso kua mis txij nkawm 2X-8.The raj yog 304 stainless hlau.

Chav nyob: Diffusion twj KT-400 (Zhenhua), Cov hauv paus hniav ZJY-150, cov twj siv tshuab 2X-70, txij nkawm twj 2X-8.

Chav nyob: diffusion twj KT-600 (Zhenhua), Cov hauv paus hniav ZJY-600, cov twj siv tshuab 2X-70, txij nkawm twj 2X-8.

Chav nyob: Diffusion twj KT-800 (Zhenhua), Cov hauv paus hniav ZJY-600, cov twj siv tshuab 2X-70, txij nkawm twj 2X-8.

Lub tshuab nqus tsev kawg: zoo dua 4 × 10-4 Pa.

Nruab nrog cov cuab yeej tiv thaiv kev kub ntxhov, kev nyab xeeb cuam tshuam tsim, phau ntawv thiab tsis siv neeg yeem.

Cov cua sov

Cua sov txoj hauv kev cua sov raj, PID tswj, siab tshaj 350 ℃ ± 1.5 ℃.

Cov pa roj ua haujlwm

Cov pa roj ntws tswj qhov ntsuas lossis phau ntawv ua kom zoo ntawm kev nce nqi.

Lub tshuab nqus tsev ionization bombardment

DC 3 KVV, 06KW cathode (siv los ntxuav cov haujlwm ua ntej txheej).

Qhov chaw ntxeem tau (yeem)

1. TELEMARK-270 ° rab phom electron (ntshuam), 6KW, high voltage 4KV-10KV kho tau, daim duab peb sab yoj scan, ncig scan, muab kauv scan.Qhov chaw nqaj zoo tsom, siab qhov tseeb qhov tseeb, thiab zoo scanning reproducibility.

2. Cov phom hluav taws xob hauv tsev (Zhenhua): 6KW, high voltage 4KV ～ 8KV kho tau, tuaj yeem xaiv daim duab peb sab yoj, sine yoj, square wave scanning dawb.

3. Crucible: rau-kab noj hniav Φ38 × 20 crucible lossis plaub-kab noj hniav Φ38 × 20 ntxiv rau ib-kab noj hniav arc-puab crucible nrog nruab nrab arc ntev ntawm 87 (siv rau kev noj haus siab ntawm cov khoom siv melting point qis melting) los yog plaub kab noj hniav Φ48 × 18 crucible.

Ion qhov chaw (yeem)

1. RF (Xov tooj cua Zaus) Ion qhov chaw (Ntshuam).

2. 5KVA Hall ion qhov chaw (tsim los ntawm Zhenhua), siv los ntxuav ua ntej electroplating lossis pabcuam plating hauv txheej txheem electroplating, uas yog txiaj ntsig los txhim kho qhov ntsuas qhov cuam tshuam ntawm cov yeeb yaj kiab, qhov ruaj khov, thiab qhov ntom ntom thiab nplaum ntawm zaj duab xis.

Zaj duab xis tuab tswj qhov system (xaiv)

1. MDC-360 siv lead ua maub los (ntshuam) tuaj yeem khaws 1 ～ 99 txheej txheej txheej txheej tsis siv neeg, 99 hom kev pab cuam cov ntaub ntawv, qhov tseeb 0.5%+1? TSHIAB yuam kev.2TELEMARK-880 siv lead ua maub los (ntshuam): tuaj yeem khaws 1 ～ 99 txheej txheej txheej txheej tsis siv neeg, 99 hom kev qhia ntawv. 精度 0.5%+1? Kho qhov yuam kev.

3. TELEMARK-820 tus tswj qhov muag (ntshuam): txais yuav ntau lub wavelength puv-spectrum kawg-taw tes tsom xam tshuab, thiab txiav txim qhov kawg ntawm zaj yeeb yaj kiab los ntawm kev tshuaj xyuas qhov sib kis (los yog kev xav) nkhaus ntawm daim ntawv saib 370-870 mm.High tswj qhov tseeb, tswj kev yoj ib leeg, kev tswj tsis siv neeg thiab kev tswj phau ntawv kuj tuaj yeem siv tau, qib siab ntawm kev koom ua ke.

4. TELEMARK-820 tus tswj qhov muag thiab TELEMARK-880 tus tswj siv lead ua tuaj yeem ua tau raws li qhov yuav tsum tau ua ntawm qhov ua tau zoo thiab siab rov ua dua txheej..

5. Kev tswj qhov muag hauv tsev (xws li 9704 sib piv monochromator, lwm yam.), lub wavelength yog kho tau los ntawm 330 rau 870, thiab qhov tseeb tuaj yeem ncav cuag ± 1.5nm.

Sib tham

Nrog lub hauv paus sib nqus, nws tuaj yeem tso rau ntawm txhua txoj haujlwm ntawm lub qhov rooj nqus lub qhov rooj thiab tswj txee.

Tej zaum koj kuj nyiam thiab