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Lub hauv paus ntsiab lus ntawm magnetron sputtering sputtering phiaj

2021年8月31日

 

Lub hauv paus ntsiab lus ntawm sputtering phiaj magnetron sputtering:

Ib qho chaw sib nqus orthogonal thiab lub tshuab hluav taws xob tau ntxiv ntawm lub hom phiaj sputtered (cov cathode) thiab anode, thiab qhov xav tau roj inert (feem ntau yog Ar gas) tau ntim rau hauv lub tshuab nqus tsev siab. Cov hlau nplaum ruaj khov 250-350 ntawm qhov chaw ntawm cov khoom siv. Gaussian magnetic teb, thiab lub tshuab hluav taws xob muaj hluav taws xob zoo tsim lub tshuab hluav taws xob orthogonal.

Nyob rau hauv qhov kev txiav txim ntawm lub tshuab hluav taws xob, Ar gas ionizes rau hauv cov ions zoo thiab hluav taws xob. Qee qhov tsis zoo siab hluav taws xob tau siv rau lub hom phiaj. Cov hluav taws xob tawm los ntawm lub hom phiaj tau cuam tshuam los ntawm kev sib nqus thiab qhov tshwm sim ionization ntawm cov roj ua haujlwm nce, tsim cov ntshav siab nyob ze cov cathode. Nyob rau hauv qhov kev txiav txim ntawm Lorentz quab yuam, Cov ions nrawm rau lub hom phiaj saum npoo av thiab foob pob lub hom phiaj ntawm qhov nrawm, yog li cov atoms sputtered tawm ntawm lub hom phiaj ua raws txoj cai ntawm kev hloov pauv sai thiab ya deb ntawm lub hom phiaj saum npoo nrog lub zog hluav taws xob ntau dua. Substrate tso rau hauv zaj duab xis.

Magnetron sputtering feem ntau muab faib ua ob hom: kev hais plaub ntug thiab xov tooj cua zaus sputtering. Lub hauv paus ntsiab lus ntawm cov khoom siv sib tsoo yog yooj yim, thiab nws tus nqi tseem nrawm dua thaum sputtering hlau ..Qhov kev thov ntau ntawm xov tooj cua zaus sputtering yog qhov dav dua. Ntxiv rau sputtering cov khoom siv hluav taws xob, cov khoom uas tsis yog cov khoom siv kuj tuaj yeem ntuav tau. Tib lub sijhawm, nws tseem tuaj yeem ua cov tshuaj tiv thaiv kab mob los npaj cov khoom sib xws xws li oxides, nitrides cov, thiab carbides..Yog tias cov xov tooj cua tau nce ntau, nws dhau los ua ntshav plasma sputtering. Tam sim no, electron cyclotron resonance (ECR) hom microwave ntshav sputtering feem ntau siv..

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