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Qhov zoo ntawm cylindrical thiab planar magnetron sputtering lub hom phiaj

2021年10月19日

Piv nrog rau lwm hom ntawv magnetron sputtering lub hom phiaj, cylindrical thiab planar magnetron sputtering lub hom phiaj khaws qhov zoo ntawm txheej zoo sib xws rau lub hom phiaj tiaj tus, thiab tuaj yeem ua kom tiav cov hom phiaj cov ntaub ntawv los ntawm ob txoj hauv kev hauv qab no Kev siv tus nqi:

(1) Thaum ob pab pawg (plaub) ntawm lub nplhaib zoo li lub qhov ntawm lub hom phiaj nto mus txog qee qhov tob, lub hom phiaj tseem ceeb (hlau nplaum ib feem) tuaj yeem tig 45 ° txheeb ze rau lub raj phiaj, yog li ntawd lwm thaj chaw ntawm lub raj phiaj uas tsis tau xeb tuaj yeem siv tau

(2) Thaum lub hom phiaj tseem ceeb ntawm cylindrical thiab planar magnetron sputtering lub hom phiaj tau tsim los ua cov phiaj tseem ceeb tig, (lub hom phiaj tseem ceeb yog tig thaum sputtering), saum npoo ntawm cov khoom siv lub hom phiaj tuaj yeem raug sputtered tusyees txheej los ntawm txheej, thiab yuav tsis muaj lub qhov. Lub sijhawm no, lub hom phiaj cov ntaub ntawv yuav siv tau zoo tshaj plaws, thiab kev siv tus nqi ntawm cov khoom siv lub hom phiaj tuaj yeem ncav cuag 50% rau 60%. Thaum lub hom phiaj cov ntaub ntawv yog cov khoom siv hlau muaj nqi, qhov no yog qhov tseeb ntawm qhov tseem ceeb..

Los ntawm kev siv lub hauv paus ntsiab lus ntawm cov hlau nplaum thiab khau hauv coaxial cylindrical magnetron sputtering lub hom phiaj los daws qhov teeb meem ntawm qhov kawg sib nqus teb, lub phiaj xwm phiaj xwm plaub fab tuaj yeem hloov pauv mus rau hauv cylindrical, planar magnetron sputtering phiaj, uas khaws cov txheej ntawm lub phiaj xwm phiaj xwm plaub fab Nyob rau qhov xwm txheej zoo sib xws, kev siv tus nqi ntawm cov khoom siv lub hom phiaj tuaj yeem ua kom ntau ntxiv, yog li txhim kho cov txiaj ntsig kev lag luam.

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