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Technical parameter list of multilayer optical coating machine

2021年8月31日

model
GX-1050A
GX-800A
GX-900A
GX1200A
Coating room size
Ф1050×1250, 304 hindi kinakalawang na asero.
Ф800×1000
Ф900×1050
Ф1200×1250
Inner size of coating cavity
The fixture bracket is 1680mm above the ground, suitable for ergonomic operation height.
The fixture bracket is 1468mm above the ground, suitable for ergonomic operation height.
The fixture bracket is 1510mm above the ground, suitable for ergonomic operation height.
1.Arched single-workpiece disc, to meet customersneeds for uniformity to a greater extent.Rotation 5-30r/min, stepless speed change.
2.The arched three-workpiece disc, planetary revolution and rotation, to meet the needs of customers for production capacity to the greatest extent.Rotation 5-30r/min, stepless speed change.
Fixture
Available in four-pieces, the angle of the bracket is adjustable, to meet the needs of customers for uniformity to a greater extent.Rotation 5-30r/min, stepless speed change.
Arched single-workpiece disc, to meet customersneeds for uniformity to a greater extent.Rotation 5-30r/min, stepless speed change.
Arched single-workpiece disc, to meet customersneeds for uniformity to a greater extent.Rotation 5-30r/min, stepless speed change.
Vacuum system
Unit: diffusion pump DIP-12000 (Leybold), Roots pump ZJY-300, mechanical pump 2X-70, maintenance pump 2X-8.The pipeline is 304 hindi kinakalawang na asero.
Unit: Diffusion pump KT-400 (Zhenhua), Roots pump ZJY-150, mechanical pump 2X-70, maintenance pump 2X-8.
Unit: diffusion pump KT-600 (Zhenhua), Roots pump ZJY-600, mechanical pump 2X-70, maintenance pump 2X-8.
Unit: Diffusion pump KT-800 (Zhenhua), Roots pump ZJY-600, mechanical pump 2X-70, maintenance pump 2X-8.
Ultimate vacuum: better than 4×10-4 Pa.
Equipped with anti-turbulence device, safety interlock design, manual and automatic optional.
Heating system
Heating method on heating tube, PID control, maximum 350℃±1.5℃.
Working gas inflation
Gas mass flow control instrument or manual fine-tuning of inflation valve.
Vacuum ionization bombardment
DC 3KV, 06KW rod cathode (used to clean the workpiece before coating).
Evaporation source (optional)
1. TELEMARK-270° electron gun (imported), 6KW, high voltage 4KV-10KV adjustable.Positioning scan, triangle wave scan, circular scan, spiral scan.Good beam spot focusing, high positioning accuracy, and good scanning reproducibility.
2. Domestic electron gun (Zhenhua): 6KW, high voltage 4KV~8KV adjustable, can choose triangle wave, sine wave, square wave scanning freely.
3. Crucible: six-cavity Φ38×20 crucible or four-cavity Φ38×20 plus one-cavity arc-shaped crucible with a center arc length of 87 (used for high consumption of low melting point evaporation materials) or four-cavity Φ48×18 crucible.
Ion source (optional)
1. RF (Radio Dalas) Ion Source (Imported).
2. 5KVA Hall ion source (produced by Zhenhua), used for cleaning before electroplating or auxiliary plating in the electroplating process, which is beneficial to improve the refractive index of the film, the firmness, and the density and adhesion of the film.
Film thickness control system (selection)
1. MDC-360 crystal controller (imported) can store 1~99 layers of automatic coating process, 99 kinds of program data, accuracy 0.5%+1? Fixed error.2TELEMARK-880 crystal controller (import): can store 1~99 layers of automatic coating process, 99 kinds of program data.精度0.5%+1? Fixed error.
3. TELEMARK-820 optical controller (import): adopts multi-wavelength full-spectrum end-point analysis technology, and judges the end of the film by analyzing the transmittance (or reflectance) curve of the monitor sheet 370-870 mm.High control accuracy, single wavelength control, automatic control and manual control can also be used.Additional MACILEOD film calculation software, high degree of integration.
4. TELEMARK-820 optical controller and TELEMARK-880 crystal controller can meet the requirements of high precision and high repeatability coating.Cooperate with host computer to realize fully automatic control.
5. Domestic optical controller (tulad ng 9704 matching monochromator, atbp.), the wavelength is adjustable from 330 sa 870, and the accuracy can reach ±1.5nm.
Communicator
With magnetic base, it can be placed at any position of the vacuum chamber door and control cabinet.

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