Manufacturing and application of PVD-coated titanium aluminum Sputtering targets

Traditionally used casting method and powder metallurgy method to produce titanium aluminum alloy target.

The casting method of titanium aluminum alloy targets cannot avoid porosity and shrinkage. Large-size titanium aluminum cast pipes and ingots cannot guarantee the sealing and waterproof effect when making the rotating tube target, and as the tube wall is etched, the wall thickness changes Thin, loose and shrinkage holes as long as there is a hole connected, the sealing will become worse, the lighter ones will leak, the target tube will start to discharge, or a large amount of impurity will participate in the reaction and cause the film to fall or the color is wrong..In severe cases, water is directly injected from the shrinkage cavity to the vacuum chamber, which will contaminate the real cavity and the vacuum unit.

Powder metallurgy process productionTitanium aluminum targetThere is no problem of porosity and shrinkage, but from the microscopic point of view of powder metallurgy, it is also a porous material, so if you want to makeTitanium aluminum rotating tube target, The requirements for material compactness are very strict, the density must be greater than 98%, but meeting the density requirements does not mean that it can be used.If the oxygen content of the titanium aluminum ingot is high and the microstructure is unreasonable, the internal stress of the titanium aluminum ingot is large, and it is easy to collapse, and it cannot be used as a rotating tube target. Therefore, there are many requirements for powder production and particle size ratio..Even if these conditions are met, the powder metallurgy titanium aluminum ring needs to be tied to the stainless steel tube or the titanium tube. Due to the large thermal expansion coefficient of titanium aluminum, the local target expansion may reach zero during sputtering..5～1m, so the traditional method of binding ingots cannot effectively solve this problem. The separation of titanium and aluminum binding ingots occurs, and the thermal energy of the target surface cannot be conducted and bursts..However, the tight matching bond is unreliable, and the quality of the plasma sprayed titanium aluminum alloy target is poor..

Decorative coating rose gold in the watch, jewelry, and eyewear industries. Recently, many requirements do not contain carbon and further make the underlying rose color close to the face rose gold..In our opinion, TiCN can no longer meet the requirements. TiAlN is the most perfect solution. Low-end watch jewelry has no requirements for film thickness and gloss. Most of them use arc titanium aluminum targets to deposit TiAlN. High-end brand watches require a thickness of more than 1um and gloss. Can’t drop.The arc is affected by droplets and has no advantage in smooth and thick film.FromO’KellyIt can be seen from the feedback of the current supply order that a better way is to deposit TiAIN with a rotating tube target, not only the color is closer to rose gold, but the gloss will not be affected after the thickness is increased..